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Developing cutting edge MEMS devices.

Resonant Microsystems is a leading developer of MEMS products for inertial guidance, adaptive optics and structural monitoring applications.


Resonant MEMS gyroscope sensors provide inertial guidance for GPS-backup and other situations in which GPS signal is not available. Applications include directional drilling and munitions.

Resonant MEMS-based adaptive optics provide superior performance at low-cost.

• Flexible: Mirrors can provide both improved beam steering and wavefront control.
• Compact: Integrated drive circuits greatly reduce form-factor.
• Higher Bandwidth: MEMS mirrors can achieve large scan angles and piston stroke with fast response.
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